Semiconductor Wafer Etcher Setup Verification Log

Date

Time

Operator

Equipment ID

Lot Number

Recipe Name/ID

Wafer Quantity

Verification Checklist

Item	Checked	Comments
Chamber Cleared & Clean
Correct Wafer Cassette Loaded
Recipe Parameters Verified
Process Gases Connected
Vacuum System Ready
Cooling/Chiller On
Interlock Status

Additional Notes

Verified By

Supervisor

Verification Time